Fundamental Electron Interactions with Plasma Processing Gases

Fundamental Electron Interactions with Plasma Processing Gases

by Loucas G. Christophorou, James K. Olthoff

Paperback(Softcover reprint of the original 1st ed. 2004)

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Product Details

ISBN-13: 9781461347415
Publisher: Springer US
Publication date: 09/21/2012
Series: Physics of Atoms and Molecules
Edition description: Softcover reprint of the original 1st ed. 2004
Pages: 781
Product dimensions: 6.10(w) x 9.25(h) x 0.06(d)

Table of Contents

1. Fundamental Electron-Molecule Interactions and their Technological Significance.- 1 Introduction.- 2 Low Energy Electron-Molecule Interaction Processes.- 2.1 Interactions of Low-Energy Electrons with Ground-State Molecules.- 2.2 Interactions of Low-Energy Electrons With Excited Molecules.- 2.3 Interactions of Low-Energy Electrons with Molecules in High Pressure Gases, Liquids, Clusters, and with Molecules at Surfaces.- 2.4 Interactions of Low-Energy Electrons With Transient Species (Radicals).- 3 Significance of Electron-Molecule Interactions in Plasma Processing.- 3.1 Low-Temperature, Low-Density, Non-Equilibrium Plasmas.- 3.2 Generation, Use, and Modeling of Low-Pressure Plasmas.- 3.3 Primary and Secondary Reactions.- 4 The Present Work.- 5 References.- 2. Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients.- 1 Introduction.- 2 Collision Cross Sections.- 2.1 Cross Sections for Elastic Electron Scattering.- 2.2 Cross Sections for Inelastic Electron Scattering.- 2.3 Partial Cross Sections.- 2.4 Total Electron Scattering Cross Section, ?sc,t (?).- 2.5 Methods of Measurement.- 2.6 Calculations.- 3 Coefficients and Rate Constants.- 3.1 Electron Transport Coefficients.- 3.2 Coefficients for Electron Attachment, and Electron-Impact Ionization and Excitation.- 3.3 Rate Constants.- 3.4 Methods of Measurement.- 4 Boltzmann-Code-Generated Collision Cross-Section Sets.- 5 References.- 3. Synthesis and Assessment of Electron Collision Data.- 1 Introduction.- 2 Synthesis, Assessment, and Recommendation of Data.- 2.1 Determination of the Cross Section for Momentum Transfer, ?m(?) of CF4.- 2.2 Determination of the Total Electron Scattering Cross Section, ?sc,t (?) of CF4 Below 1 eV 117.- 2.3 Determination of the Total Electron Attachment Cross Section, ?a,t (?), of Cl2.- 2.4 Consistency Between the Assessed Cross Sections.- 3 Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needs.- 3.1 Deduction of Unavailable Data.- 3.2 A Better Understanding from Assessed Data.- 3.3 Determination of Data Needs and New Related Measurements and Calculations.- 4 Dissemination and Updating of the Database.- 5 References.- 4. Electron Interactions with CF4, C2F6, AND C3F8.- 1 Introduction.- 2 Electron Interactions with CF4.- 2.1 Electronic and Molecular Structure of CF4.- 2.2 Electron Scattering from CF4.- 2.3 Electron-Impact Ionization of CF4.- 2.4 Electron-Impact Dissociation of CF4 into Neutral Fragments.- 2.5 Electron Attachment to CF4.- 2.6 Electron Transport in CF4.- 2.7 Electron Interactions with CF4 Neutral Fragments.- 2.8 Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for CF4.- 3 Electron Interactions with C2F6.- 3.1 Electronic and Molecular Structure of C2F6.- 3.2 Electron Scattering from C2F6.- 3.3 Electron-Impact Ionization of C2F6.- 3.4 Electron-Impact Dissociation of C2F6 into Neutral Fragments.- 3.5 Electron Attachment to C2F6.- 3.6 Electron Transport in C2F6.- 3.7 Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for C2F6.- 4 Electron Interactions with C3F8.- 4.1 Electronic and Molecular Structure of C3F8.- 4.2 Electron Scattering from C3F8.- 4.3 Electron-Impact Ionization of C3F8.- 4.4 Ionization Coefficients for C3F8.- 4.5 Electron-Impact Dissociation of C3F8 Producing Neutrals.- 4.6 Electron Attachment to C3F8.- 4.7 Electron Transport in C3F8.- 4.8 Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for C3F8.- 5 References.- 5. Electron Interactions with CHF3, CF3I, AND c-C4F8.- 1 Introduction.- 2 Electron Interactions with CHF3.- 2.1 Electronic and Molecular Structure of CHF3.- 2.2 Electron Scattering from CHF3.- 2.4 Electron-Impact Dissociation of CHF3 into Neutral Fragments.- 2.5 Electron Attachment to CHF3.- 2.6 Electron Transport Coefficients for CHF3.- 2.7 Electron-Impact Induced Light Emission from CHF3.- 2.8 Electron Interactions with CHF3 Neutral Fragments.- 2.9 Summary of Recommended and Suggested Cross Sections and Coefficients for CHF3.- 3 Electron Interactions with CF3I.- 3.1 Electronic Structure and Basic Properties of CF3I.- 3.2 Electron Scattering Cross Sections for CF3I.- 3.3 Electron-Impact Ionization of CF3I.- 3.4 Electron Attachment to CF3I.- 3.5 Optical Emission from Electron Impact on CF3I.- 3.6 Summary of Suggested Cross Sections and Coefficients for CF3I.- 4 Electron Interactions with c-C4F8.- 4.1 Structural and Electronic Properties of c-C4F8.- 4.2 Electron Scattering Cross Sections for c-C4F8.- 4.3 Electron-Impact Ionization of c-C4F8.- 4.4 Electron-Impact Dissociation of c-C4F8 into Neutral Fragments.- 4.5 Electron Attachment to c-C4F8.- 4.6 Electron Transport Coefficients for c-C4F8.- 4.7 Ion-Molecule Reactions in c-C4F8.- 4.8 Summary of Suggested and Recommended Cross Sections and Coefficients for c-C4F8.- 5 References.- 6. Electron Interactions with Cl2, CCl2F2, BCl3, AND SF6.- 1 Introduction.- 2 Electron Interactions with Cl2.- 2.1 Electronic and Molecular Structure of Cl2.- 2.2 Electron Scattering from Cl2.- 2.3 Electron-Impact Ionization of Cl2.- 2.4 Electron-Impact Dissociation of Cl2 into Neutral Fragments.- 2.5 Electron Attachment to Cl2.- 2.6 Electron Transport in Cl2.- 2.7 Optical Emission from Cl2 Gas Discharges.- 2.8 Suggested Cross Sections and Coefficients for Cl2.- 2.9 Electron Collision Data for Cl and Cl+.- 2.10 Electron Detachment, Electron Transfer, and Recombination and Diffusion Processes Involving Cl2.- 2.11 Summary of Data for Other Species and Processes Involving Cl2 Plasmas.- 3 Electron Interactions with CCl2F2.- 3.1 Electronic and Molecular Structure of CCl2F2.- 3.2 Electron Scattering from CCl2F2.- 3.3 Electron-Impact Ionization of CCl2F2.- 3.4 Electron-Impact Dissociation of CCl2F2 into Neutral Fragments.- 3.5 Electron Attachment to CCl2F2.- 3.6 Electron Transport in CCl2F2.- 3.7 Optical Emission Under Electron Impact on CCl2F2.- 3.8 Recommended and Suggested Cross Sections and Coefficients for CCl2F2.- 4 Electron Interactions with BCl3.- 4.1 Structural and Electronic Properties of BCl3.- 4.2 Electron Scattering from BCl3.- 4.3 Electron-Impact Ionization of BCl3.- 4.4 Electron Attachment to BCl3.- 4.5 Electron Transport Coefficients for BCl3.- 4.6 Suggested and Needed Data for BCl3.- 5 Electron Interactions with SF6.- 5.1 Electronic and Molecular Structure of SF6.- 5.2 Electron Scattering by SF6.- 5.3 Electron-Impact Ionization of SF6.- 5.4 Cross Sections, ?dis,neut (?), for Electron-Impact Dissociation of SF6 into Neutral Fragments.- 5.5 Electron Attachment to SF6.- 5.6 Electron Transport in SF6.- 5.7 Autodetachment, Thermally Induced Detachment, Photo detachment, and Collisional Detachment of SF6?.- 5.8 Ion Transport in SF6.- 5.9 Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for SF6.- 6 References.

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