Gate Dielectric Integrity: Material, Process and Tool Qualification

Gate Dielectric Integrity: Material, Process and Tool Qualification

Paperback

$45.00

Product Details

ISBN-13: 9780803126152
Publisher: American Society for Testing & Materials
Publication date: 03/28/2000
Series: STP Ser. , #1382
Pages: 176
Product dimensions: 6.00(w) x 9.00(h) x (d)

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