ISBN-10:
0819413631
ISBN-13:
9780819413635
Pub. Date:
12/28/1994
Publisher:
SPIE Press
Handbook of Critical Dimension Metrology and Process Control

Handbook of Critical Dimension Metrology and Process Control

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Product Details

ISBN-13: 9780819413635
Publisher: SPIE Press
Publication date: 12/28/1994
Series: Critical Reviews of Optical Science and Technology Series
Pages: 368
Product dimensions: 7.32(w) x 10.37(h) x 1.05(d)

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