ISBN-10:
0815514999
ISBN-13:
9780815514992
Pub. Date:
12/01/2005
Publisher:
Elsevier Science
Handbook of Ellipsometry

Handbook of Ellipsometry

by Harland Tompkins, Eugene A Irene
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Product Details

ISBN-13: 9780815514992
Publisher: Elsevier Science
Publication date: 12/01/2005
Series: Materials Science and Process Technology Series
Edition description: New Edition
Pages: 888
Product dimensions: 1.81(w) x 6.14(h) x 9.21(d)

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Table of Contents

PART 1: THEORY OF ELLIPSOMETRY
Polarized Light and Ellipsometry
Optical Physics of Materials
Data Analysis for Spectroscopic Ellipsometry
PART 2: INSTRUMENTATION
Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
Rotating Polarizer and Analyzer Ellipsometry
Polarization Modulation Ellipsometry
Multichannel Ellipsometry
PART 3: APPLICATIONS
SiO2 Films
Theory and Application of Generalized Ellipsometry
PART 4: EMERGING AREAS
VUV Ellipsometry
Spectroscopic Infrared Ellipsometry
Ellipsometry in Life Sciences
Index

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