Handbook of Semiconductor Technology, Volume 2: Processing of Semiconductors

Handbook of Semiconductor Technology, Volume 2: Processing of Semiconductors

Hardcover

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Product Details

ISBN-13: 9783527298358
Publisher: Wiley
Publication date: 08/15/2000
Pages: 715
Product dimensions: 7.11(w) x 9.72(h) x 1.67(d)

Table of Contents

Silicon Processing (J. Wilkes, et al.).

Compound Semiconductor Processing (J. Mullin).

Epitaxial Growth (T. Kuech & M. Tischler).

Photolithography (R. Leuschner & G. Pawlowski).

Selective Doping (S. Mahajan).

Etching Processes in Semiconductor Manufacturing (K. Donohoe, et al.).

Silicon Device Structures (C.-Y. Chang & S. Sze).

Compound Semiconductor Device Structures (W. Stanchina & J. Lam).

Silicon Device Processing (D.-L. Kwong).

Compound Semiconductor Device Processing (J. Parsey).

Integrated Circuit Packaging (D. Amey).

Interconnection Systems (W. Knausenberger).

Index.

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