ISBN-10:
1437778739
ISBN-13:
9781437778731
Pub. Date:
07/20/2012
Publisher:
Elsevier Science
Handbook of Thin Film Deposition / Edition 3

Handbook of Thin Film Deposition / Edition 3

by Krishna Seshan

Hardcover

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Product Details

ISBN-13: 9781437778731
Publisher: Elsevier Science
Publication date: 07/20/2012
Pages: 408
Product dimensions: 6.10(w) x 9.20(h) x 1.10(d)

About the Author

Formerly Assistant Professor in Materials Science at the University of Arizona and has extensive professional experience as a technologist with both the IBM and Intel Corporations.

Table of Contents

Foreword to the Third Edition

Scaling of Devices and Thermal Scaling

PVD - Special Topics

CVD New Developments

CVD Equipment

CMP Method and Practice

Process Technology for Copper Interconnects

Optical Thin Films

Thin Films in Photovoltaics

Thin Films in Memory Applications

Index

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