Laser-Assisted Microtechnology

Laser-Assisted Microtechnology

Hardcover(2nd updated ed.)

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Laser-Assisted Microtechnology by R.M. Osgood, Simeon M. Metev, Vadim P. Veiko

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

Product Details

ISBN-13: 9783540639732
Publisher: Springer Berlin Heidelberg
Publication date: 09/28/1998
Series: Springer Series in Materials Science , #19
Edition description: 2nd updated ed.
Pages: 270
Product dimensions: 6.69(w) x 9.45(h) x (d)

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