Mechanical Reconstruction of an Industrial 915MHz Microwave Cavity Plasma Reactor System for Chemical Vapor Deposition Diamond Processes

Mechanical Reconstruction of an Industrial 915MHz Microwave Cavity Plasma Reactor System for Chemical Vapor Deposition Diamond Processes

by Jörg Fricke

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Product Details

ISBN-13: 9783838675886
Publisher: diplom.de
Publication date: 06/30/2017
Pages: 118
Product dimensions: 5.83(w) x 8.27(h) x 0.28(d)

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