Microsystems Dynamics

Microsystems Dynamics

by Vytautas Ostasevicius, Rolanas Dauksevicius


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Product Details

ISBN-13: 9789400734104
Publisher: Springer Netherlands
Publication date: 12/27/2012
Series: Intelligent Systems, Control and Automation: Science and Engineering , #44
Edition description: 2011
Pages: 214
Product dimensions: 6.10(w) x 9.25(h) x 0.02(d)

Table of Contents

Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems; ;Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator; Numerical Modeling and Analysis of Fluidic-Structural Interaction; Numerical Modeling and Analysis of Electrostatic-Structural Interaction; Numerical Modeling and Analysis of Vibro-Impact Interaction; Numerical Analysis of the Micromotor; Finite Element Modeling of Micromotor; Modal Analysis; Micromotor Control; Analytical Model of a Micromotor; Basics of Micromotor Geometry; Torque Analysis; Micromotor Design Guidelines; References

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