Physical Chemistry of, in and on Silicon

Physical Chemistry of, in and on Silicon

by Gianfranco F. Cerofolini, Laura Meda

Paperback(Softcover reprint of the original 1st ed. 1989)

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Product Details

ISBN-13: 9783642735066
Publisher: Springer Berlin Heidelberg
Publication date: 12/16/2011
Series: Springer Series in Materials Science , #8
Edition description: Softcover reprint of the original 1st ed. 1989
Pages: 122
Product dimensions: 6.10(w) x 9.25(h) x 0.01(d)

Table of Contents

1. Silicon.- 1.1 Elemental Silicon.- 1.2 Silicon Metallurgy.- 1.3 Single-Crystal Growth.- 1.4 Mechanical Properties.- 1.4.1 Fracture Limit.- 1.4.2 Plastic Limit.- 2. Silicon Phases.- 2.1 Diamond-Cubic Silicon.- 2.2 Diamond-Hexagonal Silicon.- 2.3 Amorphous Silicon.- 2.3.1 Amorphous 1 (a1).- 2.3.2 Amorphous 0 (a0).- 3. Equilibrium Defects.- 3.1 Vacancies.- 3.2 Self-Interstitials.- 3.3 Vacancy-Self-Interstitial Pair.- 3.4 Stacking Faults.- 4. Impurities.- 4.1 Impurity Content.- 4.2 Oxygen.- 4.2.1 Thermal Donors.- 4.2.2 The New Thermal Donor.- 4.3 Oxygen Precipitates.- 5. Dopants.- 5.1 The Standard Theory.- 5.1.1 Electronic Properties.- 5.1.2 Equilibrium Properties.- 5.1.3 Transport Properties.- 5.2 Group V Donors.- 5.3 Group III Acceptors.- 5.3.1 Group III Acceptors as Shallow Centres.- 5.3.2 Group III Acceptors as Deep Centres.- 5.4 Generation-Recombination Phenomena.- 6. Defect-Impurity Interactions.- 6.1 Defect Influence on Impurities.- 6.2 Impurity Influence on Defects.- 6.3 Impurity-Impurity Interactions.- 7. The High Density Limit.- 7.1 Transition Metals.- 7.2 Substitutional Impurities.- 7.2.1 Clusters.- 7.2.2 Precipitation.- 7.3 General Correlations.- 7.3.1 Solubility and Segregation.- 7.3.2 Strain Entropy.- 8. Surfaces and Interfaces.- 8.1 Amorphous SÍO2.- 8.2 The Si-SiO2 Interface.- 8.3 Oxidation Kinetics.- 8.4 Surface Reconstructibility.- 9. Gettering.- 9.1 External Gettering.- 9.2 Internal Gettering.- 9.3 Heavy-Metal Gettering.- 9.4 Gettering and Device Processing Architecture.- 10.Device Processing.- 10.1 The MOS Structure.- 10.2 MOS Technology.- 10.3 A Look to the Future.- References.- Acronyms and Abbreviations.

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