Physical Chemistry of, in and on Silicon

Physical Chemistry of, in and on Silicon

by Gianfranco F. Cerofolini, Laura Meda

Paperback(Softcover reprint of the original 1st ed. 1989)

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Overview

Physical Chemistry of, in and on Silicon by Gianfranco F. Cerofolini, Laura Meda

This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.

Product Details

ISBN-13: 9783642735066
Publisher: Springer Berlin Heidelberg
Publication date: 12/16/2011
Series: Springer Series in Materials Science , #8
Edition description: Softcover reprint of the original 1st ed. 1989
Pages: 122
Product dimensions: 6.10(w) x 9.25(h) x 0.01(d)

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