ISBN-10:
0471330019
ISBN-13:
9780471330011
Pub. Date:
02/28/2000
Publisher:
Wiley
Physical Vapor Deposition of Thin Films / Edition 1

Physical Vapor Deposition of Thin Films / Edition 1

by John E. Mahan

Hardcover

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Product Details

ISBN-13: 9780471330011
Publisher: Wiley
Publication date: 02/28/2000
Pages: 336
Product dimensions: 6.46(w) x 9.37(h) x 0.88(d)

About the Author

JOHN E. MAHAN, PhD, is Professor of Electrical Engineering at Colorado State University.

Table of Contents

Introduction to Physical Vapor Deposition.

The Kinetic Theory of Gases.

Adsorption and Condensation.

Principles of High Vacuum.

Evaporation Sources.

Principles of Sputtering Discharges.

Sputtering.

Film Deposition.

Index.

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