This second edition of Precision Motion Control focuses on enabling technologies for precision engineering. It has been extensively edited and rewritten throughout with the following particular areas being expanded or added:
• piezoelectric actuators
• fine movement control
• gantry-stage control
• interpolation of quadrature encoder signals
• geometrical error modeling for single-, dual- and general-XY-axis stages.
Table of ContentsPrecision Tracking Motion Control.- Automatic Tuning of Control Parameters.- Co-ordinated Motion Control of Gantry Systems.- Geometrical Error Compensation.- Electronic Interpolation Errors.- Vibration Monitoring and Control.- Other Engineering Aspects.