ISBN-10:
0470866772
ISBN-13:
9780470866771
Pub. Date:
05/12/2006
Publisher:
Wiley
Scanning Auger Electron Microscopy / Edition 1

Scanning Auger Electron Microscopy / Edition 1

Hardcover

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Product Details

ISBN-13: 9780470866771
Publisher: Wiley
Publication date: 05/12/2006
Pages: 384
Product dimensions: 6.30(w) x 9.30(h) x 0.90(d)

Table of Contents

List of Contributors.

Preface.

Acknowledgments.

1. Introduction (M.M. El Gomati and M. Prutton).

2. The Auger Process (J.A.D. Matthew).

3. Instrumentation (M.M. El Gomati and M. Prutton).

4. The Spatial Resolution (M.M. El Gomati).

5. Forming an Auger Image (M.M. El Gomati and M. Prutton).

6. Image Processing and Interpretation (M. Prutton).

7. Quantification of Auger Images (M. Prutton).

8. Applications: Materials Science (R.K. Wild).

9. Applications: Semiconductor Manufacturing (C.F.H. Gondran).

10. Concluding Remarks (M.M. El Gomati and M. Prutton).

Author Index.

Subject Index.

What People are Saying About This

From the Publisher

"…this book fills a key gap for researchers and graduate students." (Journal of the American Chemical Society, December 27, 2006)

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