ISBN-10:
081943129X
ISBN-13:
9780819431295
Pub. Date:
12/28/1998
Publisher:
SPIE Press
Selected Papers on Optical MEMS

Selected Papers on Optical MEMS

by Victor M. Bright, V. M. Bright

Hardcover

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Product Details

ISBN-13: 9780819431295
Publisher: SPIE Press
Publication date: 12/28/1998
Series: Milestone Series
Pages: 644
Product dimensions: 9.00(w) x 10.80(h) x 1.75(d)

Table of Contents

Section 1MEMS Technology--Review Papers on Fabrication and Various Devices
Silicon as a mechanical material (Proceedings of the IEEE 1982)3
Silicon micromechanics: sensors and actuators on a chip (IEEE Spectrum 1990)41
Microfabricated hinges (Sensors and Actuators A: Physical 1992)46
Micromachines on the march (IEEE Spectrum 1994)54
Micro-opto-electro-mechanical systems (Optical Engineering 1994)66
Micromachined free-space integrated micro-optics (Sensors and Actuators A: Physical 1995)79
Application of micromachining technology to optical devices and systems (in Micromachining and Microfabrication Process Technology II, S.W. Pang, S.-C. Chang, editors, 1996)87
Micro-opto-electro-mechanical devices and on-chip optical processing (Optical Engineering 1997)97
Section 2Displays/Adaptive Optics
Commercial CMOS foundry thermal display for dynamic thermal scene simulation (in Infrared Imaging Systems: Design, Analysis, Modeling, and Testing IV, G.C. Holst, editor, 1993)115
128[times]128 deformable mirror device (IEEE Transactions on Electron Devices 1983)122
A multiplexed silicon infrared thermal imager (in Transducers '91, International Conference on Solid-State Sensors and Actuators 1991)129
Deformable-mirror spatial light modulators (in Spatial Light Modulators and Applications III, U. Efron, editor, 1989)133
Mirrors on a chip (IEEE Spectrum 1993)150
Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications (in Space Astronomical Telescopes and Instruments II, P.Y. Bely, J.B. Breckinridge, editors, 1993)155
Line-addressable torsional micromirrors for light modulator arrays (Sensors and Actuators A: Physical 1994)165
Deformable grating light valves for high resolution displays (in Solid-State Sensor and Actuator Workshop 1994)171
512[times]512 infrared scene projector array for low-background simulations (in Solid-State Sensor and Actuator Workshop 1994)177
Implementation and characterization of a flexure-beam micromechanical spatial light modulator (Optical Engineering 1994)183
Digital micromirror device imaging bar for hardcopy (in Color Hard Copy and Graphic Arts IV, J. Bares, Editor, 1995)189
Advanced modeling of micromirror devices (in International Conference on Integrated Micro/Nanotechnology for Space Applications 1995)197
High speed interferometric device for real-time correction of aero-optic effects (in 26th AIAA Plasmadynamics and Lasers Conference 1995)213
Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)224
Projection display systems based on the Digital Micromirror Device (DMD) (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)236
A method for designing electrostatic-actuator electrode pattern in micromachined deformable mirrors (Sensors and Actuators A: Physical 1996)248
Deformable micromirror devices as phase-modulating high-resolution light valves (Sensors and Actuators A: Physical 1996)255
Micro-opto-electro-mechanical (MOEM) adaptive optic system (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)261
Development of microelectromechanical deformable mirrors for phase modulation of light (Optical Engineering 1997)274
Continuous-membrane surface-micromachined silicon deformable mirror (Optical Engineering 1997)281
Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results (Optical Engineering 1997)288
Aberration-correction results from a segmented microelectromechanical deformable mirror and a refractive lenslet array (Optics Letters 1998)301
Technology and applications of micromachined silicon adaptive mirrors (Optical Engineering 1997)304
Thermally actuated piston micromirror arrays (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)313
Section 3Beam Steering/Scanning
The development of polysilicon micromotors for optical scanning applications (in Solid-State Sensor and Actuator Workshop 1994)327
Diffraction grating scanners using polysilicon micromotors (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)332
Surface-micromachined free-space micro-optical systems containing three-dimensional microgratings (Applied Physics Letters 1995)338
2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)341
Out-of-plane refractive microlens fabricated by surface micromachining (IEEE Photonics Technology Letters 1996)345
Surface-micromachined mirrors for laser-beam positioning (Sensors and Actuators A: Physical 1996)348
Linear vibromotor-actuated micromachined microreflector for integrated optical systems (in Solid-State Sensor and Actuator Workshop 1996)353
Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners (in IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems 1996)357
Polysilicon micromechanical gratings for optical modulation (Sensors and Actuators A: Physical 1996)363
Arrays of thermal micro-actuators coupled to micro-optical components (in Actuator Technology and Applications, A.E. Hatheway, editor, 1996)370
Microactuated micro-XYZ stages for free-space micro-optical bench (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)379
Micro-electro-mechanical variable blaze gratings (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)385
Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)392
Scanning and rotating micromirrors using thermal actuators (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)404
Micromachined electromagnetic scanning mirrors (Optical Engineering 1997)415
Self-assembled microactuated XYZ stages for optical scanning and alignment (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)424
Actuated polysilicon micromirrors for raster-scanning displays (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)428
Section 4Spectrometers
Integrated grating/detector array fabricated in silicon using micromachining techniques (Sensors and Actuators A: Physical 1992)435
Miniaturized spectrometers for biochemical analysis (in Solid-State Sensor and Actuator Workshop 1996)443
Tunable IR filters with integral electromagnetic actuators (in Solid-State Sensor and Actuator Workshop 1996)447
Optical performance of high-aspect LIGA gratings (Optical Engineering 1997)451
Surface-micromachined diffraction gratings for scanning spectroscopic applications (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)458
Section 5Communications/Switching
Microactuators for aligning optical fibers (Sensors and Actuators A: Physical 1989)463
Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems (in Transducers '91, International Solid-State Conference on Sensors and Actuators 1991)472
Microchopper-modulated IR microlamp (in Solid-State Sensor and Actuator Workshop 1994)476
Microfabricated optical chopper (Optical Engineering 1994)480
Surface micromachined tuneable interferometer array (Sensors and Actuators A: Physical 1994)489
Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon (Journal of Micromechanics and Microengineering 1995)496
A piezoelectrically operated optical chopper by quartz micromachining (Journal of Microelectromechanical Systems 1995)504
Fabrication of a mechanical antireflection switch for fiber-to-the-home systems (Journal of Microelectromechanical Systems 1996)511
Megahertz opto-mechanical modulator (Sensors and Actuators A: Physical 1996)518
Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining (IEEE Photonics Technology Letters 1996)523
Surface micromachined Fabry-Perot tunable filter (IEEE Photonics Technology Letters 1996)526
Optically excited self-resonant microbeams (Sensors and Actuators A: Physical 1996)529
Micromachined 1[times]2 optical-fiber switch (Sensors and Actuators A: Physical 1996)536
Micro-optical and opto-mechanical systems fabricated by the LIGA technique (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)541
The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)547
Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications (Journal of Microelectromechanical Systems 1997)
Optical communication using micro corner cube reflectors (in MEMS '97, 10th IEEE International Workshop on Micro Electro Mechanical Systems 1997)568
Microjoinery for optomechanical systems (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)574
A micro shutter for applications in optical and thermal detectors (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)582
Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)586
An electromagnetic MEMS 2[times]2 fiber optic bypass switch (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)590
Micro-optical gate for fiber optic communication (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)594
Section 6Lasers/Detectors
Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers (IEEE Photonics Technology Letters 1996)601
Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking (IEEE Photonics Technology Letters 1996)604
Wide and continuous wavelength tuning in a vertical-cavity surface-emitting laser using a micromachined deformable-membrane mirror (Applied Physics Letters 1996)607
InP-based micro-mechanical tunable and selective photodetector for WDM systems (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)610
Surface micromachined long wavelength LED/photodetector with a continuous tuning range of 75 nm (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)616

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