SEM Microcharacterization of Semiconductors

SEM Microcharacterization of Semiconductors

ISBN-10:
0123538556
ISBN-13:
9780123538550
Pub. Date:
02/11/1989
Publisher:
Elsevier Science

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Overview

SEM Microcharacterization of Semiconductors

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Product Details

ISBN-13: 9780123538550
Publisher: Elsevier Science
Publication date: 02/11/1989
Series: Techniques of Physics Series , #12
Pages: 452
Product dimensions: 1.06(w) x 6.14(h) x 9.21(d)

Table of Contents

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

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