Silicides for VLSI Applications

Silicides for VLSI Applications

by Shyam P. Murarka, S. P. Murarka

Hardcover

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Product Details

ISBN-13: 9780125112208
Publisher: Elsevier Science
Publication date: 04/11/1983
Pages: 200
Product dimensions: 6.46(w) x 9.38(h) x 0.74(d)

Table of Contents

Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.

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