The Chemistry of Metal CVD

The Chemistry of Metal CVD


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Product Details

ISBN-13: 9783527290710
Publisher: Wiley
Publication date: 04/15/2000
Pages: 530
Product dimensions: 6.87(w) x 9.69(h) x 1.19(d)

Table of Contents

From the Contents:
Jairath/Jain/Tolles/Kodas/Hampden-Smith: Introduction. Simmonds/Gladfelter: Aluminum.
Zinn: Tungsten. Griffin/Maverick: Copper from Copper(II). Hampden-Smith/Kodas: Copper from Copper(I). Baum/Comita: Gold and Silver. Zinn/Brandt/Kaes: Platinum, Palladium, Nickel.
Kodas/Hampden-Smith: Assorted Metals. Kodas/Hampden-Smith: Overview of Metal CVD

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