Thin-Film Deposition: Principles and Practice / Edition 1

Thin-Film Deposition: Principles and Practice / Edition 1

by Donald L. Smith
ISBN-10:
0070585024
ISBN-13:
9780070585027
Pub. Date:
03/01/1995
Publisher:
McGraw-Hill Professional Publishing
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Overview

Thin-Film Deposition: Principles and Practice / Edition 1

Thin film deposition is a broad and burgeoning field,with applications ranging from razor blade coatings to quantum-well lasers. However,much of the available thin film literature is based on empirical knowledge,and focuses only on specific processes or applications. This volume rectifies that situation,offering a complete description od the theory and technology of thin film deposition. The book's broad perspective gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. This indispensable volume also includes a complete list of symbols and an extensive index.

Product Details

ISBN-13: 9780070585027
Publisher: McGraw-Hill Professional Publishing
Publication date: 03/01/1995
Pages: 616
Product dimensions: 6.50(w) x 9.30(h) x 1.31(d)

Table of Contents

Thin Film Technology.
Gas Kinetics.
Vacuum Technology.
Evaporation.
Deposition.
Epitaxy.
Chemical Vapor Deposition.
High-Energy Techniques.
Plasma Processes.
Film Characterization.

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