Topics in Growth and Device Processing of III-V Semiconductors

Topics in Growth and Device Processing of III-V Semiconductors

ISBN-10:
9810218842
ISBN-13:
9789810218843
Pub. Date:
11/28/1996
Publisher:
World Scientific Publishing Company, Incorporated

Hardcover

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Overview

Topics in Growth and Device Processing of III-V Semiconductors

This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.

Product Details

ISBN-13: 9789810218843
Publisher: World Scientific Publishing Company, Incorporated
Publication date: 11/28/1996
Series: International Series On Advances In Solid State Electronics And Technology Series
Pages: 560
Product dimensions: 6.50(w) x 1.50(h) x 9.50(d)

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