A User's Guide to Vacuum Technology / Edition 3

A User's Guide to Vacuum Technology / Edition 3

by John F. O'Hanlon
Pub. Date:


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A User's Guide to Vacuum Technology / Edition 3

In the decade and a half since the publication of the SecondEdition of A User's Guide to Vacuum Technology there havebeen many important advances in the field, including spinning rotorgauges, dry mechanical pumps, magnetically levitated turbo pumps,and ultraclean system designs. These, along with improved cleaningand assembly techniques have made contamination-free manufacturinga reality. Designed to bridge the gap in both knowledge andtraining between designers and end users of vacuum equipment, theThird Edition offers a practical perspective on today's vacuumtechnology. With a focus on the operation, understanding, andselection of equipment for industrial processes used insemiconductor, optics, packaging, and related coating technologies,A User's Guide to Vacuum Technology, Third Edition providesa detailed treatment of this important field. While emphasizing thefundamentals and touching on significant topics not adequatelycovered elsewhere, the text avoids topics not relevant to thetypical user.

Product Details

ISBN-13: 9780471270522
Publisher: Wiley
Publication date: 07/28/2003
Edition description: REV
Pages: 536
Sales rank: 1,121,202
Product dimensions: 6.40(w) x 9.50(h) x 1.22(d)

About the Author

John F. O’Hanlon, PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

Table of Contents

Vacuum Technology.

Gas Properties.

Gas Flow.

Gas Release from Solids.

Pressure Gauges.

Flow Meters.

Pumping Speed.

Residual Gas Analyzers.

Interpretation of RGA Data.

Mechanical Pumps.

Turbomolecular Pumps.

Diffusion Pumps.

Pump Fluids.

Getter and Ion Pumps.

Cryogenic Pumps.

Materials in Vacuum.

Joints, Seals, and Valves.


Rough Vacuum Pumping.

High Vacuum Systems.

Ultraclean Vacuum Systems.

High Flow Systems.

Multichamber Systems.

Leak Detection.


Appendix A. Units and Constants.

Appendix B. Gas Properties.

Appendix C. Material Properties.

Appendix D. Isotopic Abundances.

Appendix E. Cracking Patterns.

Appendix F. Pump Fluid Properties.


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