Pub. Date:
McGraw-Hill Higher Education
VLSI Technology / Edition 2

VLSI Technology / Edition 2

by Simon M. Sze, Sze
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This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.

Product Details

ISBN-13: 9780070627352
Publisher: McGraw-Hill Higher Education
Publication date: 02/01/1988
Series: McGraw-Hill Series in Electrical and Computer Engineering
Edition description: 2nd ed
Pages: 676
Product dimensions: 6.67(w) x 9.53(h) x 1.68(d)

Table of Contents

1 Crystal Growth and water prepreparation2 Epitaxy 3 Oxidation 4 Lithography 5 Reactive Plasma Etching 6 Dielectric and Polysilicon Film Deposition 7 Diffusion, Ion Implementation 8 Metallization 9 Process Simulation 10 LSI Process Integration 11 Analytical Techniques 12 Assembly techniques and Packaging of VLSI Devices 13 Yield and Reliability

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