VLSI Technology / Edition 2 available in Hardcover
This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
|Publisher:||McGraw-Hill Higher Education|
|Series:||McGraw-Hill Series in Electrical and Computer Engineering|
|Edition description:||2nd ed|
|Product dimensions:||6.67(w) x 9.53(h) x 1.68(d)|
Table of Contents1 Crystal Growth and water prepreparation2 Epitaxy 3 Oxidation 4 Lithography 5 Reactive Plasma Etching 6 Dielectric and Polysilicon Film Deposition 7 Diffusion, Ion Implementation 8 Metallization 9 Process Simulation 10 LSI Process Integration 11 Analytical Techniques 12 Assembly techniques and Packaging of VLSI Devices 13 Yield and Reliability