Dynamics of Microelectromechanical Systems

by Nicolae Lobontiu

Overview

Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

• An in-depth treatment of problems that involve reliable modeling, analysis and design,

• Analytical models with correct dependences on service dimensions,

• Cantilever based systems for nanofabrication researchers and designers, and

• Dynamics of complex spring and beam microsystems.

This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Product Details

ISBN-13:	9780387368009
Publisher:	Springer US
Publication date:	10/03/2007
Series:	Microsystems , #17
Edition description:	2007
Pages:	403
Product dimensions:	6.10(w) x 9.25(h) x 0.04(d)

Table of Contents

Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.