Electroceramic-Based MEMS: Fabrication-Technology and Applications

by Nava Setter (Editor)

Overview

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics:

Part A: Applications and devices with electroceramic-based MEMS:

Chemical microsensors

Microactuators based on thin films

Micromachined ultrasonic transducers

Thick-film piezoelectric and magnetostrictive devices

Pyroelectric microsystems

RF bulk acoustic wave resonators and filters

High frequency tunable devices

MEMS for optical functionality

Part B: Materials, fabrication technology, and functionality:

Ceramic thick films for MEMS

Piezoelectric thin films for MEMS

Materials and technology in thin films for tunable high frequency devices

Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics

Microfabrication of piezoelectric MEMS

Nano patterning methods for electroceramics

Soft lithography emerging techniques

The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field.

The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Product Details

ISBN-13:	9781441936042
Publisher:	Springer US
Publication date:	12/06/2010
Series:	Electronic Materials: Science & Technology , #9
Edition description:	Softcover reprint of hardcover 1st ed. 2005
Pages:	414
Product dimensions:	6.10(w) x 9.25(h) x 0.36(d)

Table of Contents

Applications and Devices.- MEMS-Based Thin Film and Resonant Chemical Sensors.- Microactuators Based on Thin Films.- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films.- Thick-Film Piezoelectric and Magnetostrictive Devices.- Micromachined Infrared Detectors Based on Pyroelectric Thin Films.- RF Bulk Acoustic Wave Resonators and Filters.- High Frequency Tuneable Devices Based on Thin Ferroelectric Films.- MEMS for Optical Functionality.- Materials, Fabrication-Technology, and Functionality.- Ceramic Thick Films for MEMS.- Thin Film Piezoelectrics for MEMS.- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices.- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics.- Microfabrication of Piezoelectric MEMS.- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics.- Low-Cost Patterning of Ceramic Thin Films.