Electroceramic-Based MEMS: Fabrication-Technology and Applications

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics:

Part A: Applications and devices with electroceramic-based MEMS:

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