Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography

ISBN-10:
0819423785
ISBN-13:
9780819423788
Pub. Date:
03/14/1997
Publisher:
SPIE Press
ISBN-10:
0819423785
ISBN-13:
9780819423788
Pub. Date:
03/14/1997
Publisher:
SPIE Press
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography

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Product Details

ISBN-13: 9780819423788
Publisher: SPIE Press
Publication date: 03/14/1997
Series: IEE Materials & Devices Series , #12
Edition description: Volume 1
Pages: 776
Product dimensions: 7.30(w) x 10.24(h) x 1.88(d)

Table of Contents

Prefacevii
Introduction3
1Optical lithography11
2Electron beam lithography139
3X-ray lithography251
4Deep-uv resist technology321
5Photomask fabrication procedures and limitations377
6Metrology methods in photolithography475
7Optical lithography modeling597
8Issues in nanolithography for quantum effect device manufacture681
Index765
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