Handbook of Optical Metrology: Principles and Applications

by Toru Yoshizawa (Editor)

Overview

The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals.

Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.

With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.

Product Details

ISBN-13:	9781138112087
Publisher:	Taylor & Francis
Publication date:	05/31/2017
Pages:	744
Product dimensions:	7.00(w) x 10.00(h) x (d)

About the Author

Toru Yoshizawa received his BS, MS, and doctorate of engineering from the University of Tokyo, Japan. After ten years of research and educational works at Yamanashi University, Kofu, Japan, he moved to Tokyo University of Agriculture and Technology, Japan, where he was professor in the Department of Mechanical Systems Engineering for 25 years. After retirement from the university, he worked in industry for three years, and then moved to Saitama Medical University, Japan to explore medical and biomedical fields using optical techniques. Currently he is director at Non-Profit Organization 3D Associates, Yokohama, Japan, and professor emeritus at Tokyo University of Agriculture and Technology.

Table of Contents

Introduction. Fundamentals of Optical Elements and Devices. Light Sources. Lenses, Prisms and Mirrors. Optoelectronic Sensors. Optical Devices and Optomechanical Elements. Fundamentals Principles and Techniques for Metrology. Propagation of Light. Interferometry. Holography. Speckle Methods and Applications. Moire Metrology. Optical Heterodyne Measurement Method. Diffraction. Scattering. Polarization. Near-Field Optics. Practical Applications. Length and Size. Displacement. Straightness and Parallelism. Flatness. Surface Profilometry. Three-Dimensional Shape Measurement. Fringe Analysis. Photogrammetry. Optical Methods in Solid Mechanics. Optical Methods in Flow Measurement. Polarimetry. Birefringence Measurement. Ellipsometry. Optical Thin Film and Coatings. Film Surface and Thickness Profilometry. On-Machine Measurement.