Handbook of Vacuum Technology / Edition 2

by Karl Jousten, C. Benjamin Nakhosteen

Overview

This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology.
The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more.
As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

Product Details

ISBN-13:	9783527413386
Publisher:	Wiley
Publication date:	08/22/2016
Edition description:	Revised
Pages:	1050
Product dimensions:	7.00(w) x 9.80(h) x 2.20(d)

About the Author

Karl Jousten is head of the section Vacuum Metrology at the Physikalisch-Technische Bundesanstalt (PTB), the German National Institute for Metrology. He obtained his masters and Ph.D. degree in physics from the University of Heidelberg. After working as a post-doc at the Max-Planck-Institute for Nuclear Physics in Heidelberg, at the Oregon Graduate Institute of Science and Technology in the United States, and finally at the Fritz-Haber-Institute in Berlin, he joined the vacuum group at PTB in Berlin in 1990 that he leads since 1992. He has authored many scientific articles in the field as well as contributions to textbooks and edits the German edition of this book, "Wutz Handbuch Vakuumtechnik". He is active in the field of national (DIN) and international (ISO) standardization in vacuum technology. From 2005 to 2008, Karl Jousten has served as President of the German Vacuum Society. Since 2005 he chairs the international working group for low and very low pressures of the respective committee (CCM) of the Meter Convention.

Table of Contents

Preface xxiii

1 The History of Vacuum Science and Vacuum Technology 1

References 16

Further Reading 17

2 Applications and Scope of Vacuum Technology 19

References 27

3 Gas Laws and Kinetic Theory of Gases 29

3.1 Description of the Gas State 29

3.2 Kinetic Theory of Gases 38

3.3 Transport Properties of Gases 50

3.4 Real Gases 65

3.5 Vapors 75

References 81

Comprehensive general treatments of the subject 82

4 Gas Flow 83

4.1 Types of Flows and Definitions 83

4.2 Inviscid Viscous Flow and Gas Dynamics 93

4.3 Frictional–Viscous Flow through a Tube 114

4.4 Molecular Flow under High-Vacuum and Ultrahigh-Vacuum Conditions 131

4.5 Flow throughout the Entire Pressure Range 151

4.6 Flow with Temperature Difference, Thermal Effusion, and Transpiration 158

4.7 Measuring Flow Conductances 162

References 166

Further Reading 166

5 Analytical and Numerical Calculations of Rarefied Gas Flows 167

5.1 Main Concepts 167

5.2 Methods of Calculations of Gas Flows 178

5.3 Velocity Slip and Temperature Jump Phenomena 181

5.4 Momentum and Heat Transfer Through Rarefied Gases 185

5.5 Flows Through Long Pipes 199

5.6 Flow Through an Orifice 218

5.7 Modeling of Holweck Pump 221

5.8 Appendix A 223

References 225

6 Sorption and Diffusion 229

6.1 Sorption Phenomena and the Consequences, Definitions, and Terminology 229

6.2 Adsorption and Desorption Kinetics 234

6.3 Absorption, Diffusion, and Outgassing 247

6.4 Permeation 254

References 256

Further Reading 256

7 Positive Displacement Pumps 259

7.1 Introduction and Overview 259

7.2 Oscillating Positive Displacement Pumps 262

7.3 Single-Shaft Rotating Positive Displacement Pumps 276

7.4 Twin-Spool Rotating Positive Displacement Pumps 305

7.5 Specific Properties of Oil-Sealed Positive Displacement Pumps 331

7.6 Basics of Positive Displacement Pumps 337

7.7 Operating and Safety Recommendations 345

7.8 Specific Accessories for Positive Displacement Pumps 350

References 356

Further Reading on Positive Displacement Pumps 359

8 Condensers 361

8.1 Condensation Processes Under Vacuum 361

8.2 Condenser Designs 370

8.3 Integrating Condensers into Vacuum Systems 376

8.4 Calculation Examples 380

References 382

9 Jet and Diffusion Pumps 383

9.1 Introduction and Overview 383

9.2 Liquid Jet Vacuum Pumps 385

9.3 Steam Jet Vacuum Pumps 387

9.4 Diffusion Pumps 396

9.5 Diffusion Pumps Versus Vapor Jet Pumps 415

References 417

10 Molecular and Turbomolecular Pumps 419

10.1 Introduction 419

10.2 Molecular Pumps 421

10.3 Molecular and Regenerative Drag Pump Combination 427

10.4 Physical Fundamentals of Turbomolecular Pump Stages 430

10.5 Turbomolecular Pumps 439

10.6 Performance Characteristics of Turbomolecular Pumps 450

10.7 Operation and Maintenance of Turbomolecular Pumps 455

10.8 Applications 457

References 460

11 Sorption Pumps 463

11.1 Introduction 463

11.2 Adsorption Pumps 464

11.3 Getter 472

11.4 Ion Getter Pumps 493

11.5 Orbitron Pumps 507

References 508

Further Reading 509

12 Cryotechnology and Cryopumps 511

12.1 Introduction 511

12.2 Methods of Refrigeration 512

12.3 Working Principles of Cryopumps 520

12.4 Design of Cryopumps 531

12.5 Characteristics of a Cryopump 547

12.6 Application Examples 555

References 562

13 Total Pressure Vacuum Gauges 565

13.1 Introduction 565

13.2 Mechanical Vacuum Gauges 566

13.3 Spinning Rotor Gauges (Gas-Friction Vacuum Gauges) 584

13.4 Direct Electric Pressure Measuring Transducers 593

13.5 Thermal Conductivity Vacuum Gauges 594

13.6 Thermal Mass Flowmeters 604

13.7 Ionization Gauges 607

13.8 Combined Vacuum Gauges 637

References 639

14 Partial Pressure Vacuum Gauges and Leak Detectors 643

14.1 Introduction 643

14.2 Partial Pressure Analysis by Mass Spectrometry 643

14.3 Partial Pressure Measurement Using Optical Methods 672

14.4 Leak Detectors 675

References 692

15 Calibrations and Standards 697

15.1 Introduction 697

15.2 Calibration of Vacuum Gauges 700

15.3 Calibrations of Residual Gas Analyzers 733

15.4 Calibration of Test Leaks 735

15.5 Standards for Determining Characteristics of Vacuum Pumps 738

References 742

16 Materials 747

16.1 Requirements and Overview of Materials 747

16.2 Materials for Vacuum Technology 749

16.3 Gas Permeability and Gas Emissions of Materials 763

References 774

Further Reading 775

17 Vacuum Components, Seals, and Joints 777

17.1 Introduction 777

17.2 Vacuum Hygiene 778

17.3 Joining Technologies in Vacuum Technology 781

17.4 Components 806

Abbreviations 839

References 840

18 Operating Vacuum Systems 843

18.1 Electronic Integration of Vacuum Systems 843

18.2 Calculation of Vacuum Systems 851

18.3 Pressure Control 859

18.4 Techniques for Operating Low-Vacuum Systems 860

18.5 Techniques for Operating Fine-Vacuum Systems 870

18.6 Techniques for Operating High-Vacuum Systems 879

18.7 Techniques for Operating Ultrahigh-Vacuum Systems 892

References 904

19 Methods of Leak Detection 907

19.1 Overview 907

19.2 Properties of Leaks 912

19.3 Overview of Leak-Detection Methods (See Also DIN EN 1779) 918

19.4 Leak Detection Using Helium Leak Detectors 925

19.5 Leak Detection with Other Tracer Gases 936

19.6 Industrial Tightness Testing of Mass-Production Components 937

References 942

Further Reading 942

Appendix 943

Index 1003

Directory of Products and Suppliers 1023