Introduction to Microelectromechanical Systems Engineering

by Nadim Maluf

Overview

Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS — including silicon, polymers and glass and quartz substrates — as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defense.

A unique element of this book is its look at the future of MEMS – its potential for microelectrode arrays, actuators and optical switches and other technologies. It is a unique, first-of-its-kind resource that will appeal to managers, consultants and engineers looking to understand and exploit the commercial potential of MEMS, as well as university professors and graduate students.

Product Details

ISBN-13:	9780890065815
Publisher:	Artech House, Incorporated
Publication date:	02/02/2004
Series:	Artech House Microelectromechanical Systems Series
Edition description:	2ND
Pages:	292
Product dimensions:	6.00(w) x 9.00(h) x 0.81(d)

About the Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. Prior to joining New Focus, he was head of research and development at NovaSenor. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University and his M.S. in electrical engineering at the California Institute of Technology. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley. He is the author of numerous papers on MEM devices and fabrication processes.

Table of Contents

Contents: MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. The Gearbox: Commercial MEM Structures and Systems. The New Gearbox: A Peek Into The Future. The Box: Packaging For MEMS.

Editorial Reviews

Maluf (electrical engineering, Stanford U.) describes the materials used in the tiny highbryd systems, such as silicon, polymers, and glass and quartz substrates and the design and fabrication of nozzles, pressure and inertial sensors, valves, displays, and other applications. He examines the manufacture of commercial systems using surface and bulk micromachining techniques, among them oxidation, lithography, chemical vapor deposition, silicon fusion bonding, and anisotropic wet and dry etching. His treatment is a reference for engineers and students. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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