Matching Properties of Deep Sub-Micron MOS Transistors

by Jeroen A. Croon, Willy M Sansen, Herman E. Maes

Overview

Introduction: Matching analysis. Importance for circuit design. State of the art. Research objectives. Outline of this book.- Measurement and Modeling of Mismatch. Measurement setup. Experimental setup. Modeling of mismatch in the drain current. Width and length dependence. Example: Yield of a current-steering D/A converter. Conclusions.- Parameter Extraction. Extraction methods. Experimental setup. Comparison of extraction methods. Future issues. Conclusions.- Physical Origins of Mosfet Mismatch. Basic operation of the MOS transistor. Mismatch in the drain current. Physical origins of fluctuations. Conclusions.- Technological Aspects. Technology descriptions. Impact of the gate. Impact of the halo implantation. Comparison of di(R)erent CMOS technologies. Alternative device concepts. Conclusions.- Impact of Line-Edge Roughness. Characterization of line-edge roughness. Modeling the impact of line-width roughness. Experimental investigation of the impact of LWR. Prediction of the impact of LWR and guidelines. Conclusions.- Conclusions, Future Work and Outlook. Conclusions. Future work.- Outlook.

Product Details

ISBN-13:	9781441937186
Publisher:	Springer US
Publication date:	12/01/2010
Series:	The Springer International Series in Engineering and Computer Science , #851
Edition description:	Softcover reprint of hardcover 1st ed. 2005
Pages:	206
Product dimensions:	6.30(w) x 9.45(h) x 0.02(d)

Table of Contents

Introduction: Matching analysis. Importance for circuit design. State of the art. Research objectives. Outline of this book.- Measurement and Modeling of Mismatch. Measurement setup. Experimental setup. Modeling of mismatch in the drain current. Width and length dependence. Example: Yield of a current-steering D/A converter. Conclusions.- Parameter Extraction. Extraction methods. Experimental setup. Comparison of extraction methods. Future issues. Conclusions.- Physical Origins of Mosfet Mismatch. Basic operation of the MOS transistor. Mismatch in the drain current. Physical origins of fluctuations. Conclusions.- Technological Aspects. Technology descriptions. Impact of the gate. Impact of the halo implantation. Comparison of di®erent CMOS technologies. Alternative device concepts. Conclusions.- Impact of Line-Edge Roughness. Characterization of line-edge roughness. Modeling the impact of line-width roughness. Experimental investigation of the impact of LWR. Prediction of the impact of LWR and guidelines. Conclusions.- Conclusions, Future Work and Outlook. Conclusions. Future work.- Outlook.