Table of ContentsPreface. Plasma and Discharge Physics for Materials Processing; H.M. Anderson. The Physical Foundations of Ion Beam Interaction with Solids; J.P. Biersack. Ion-Surface Interactions: Collisional Sputtering, Thermal Sputtering, Ion-Beam Mixing, Compositional Change; R. Kelly, A. Miotello. Interface Structure, Adhesion and Ion Beam Processing; J.E.E. Baglin. The Science, Technology and Materials Applications of Physical Vapor Deposition Processes; M.J. O'Keefe, J.M. Rigsbee. Conventional and Novel Chemical Vapor Deposition Techniques -- Coating Methods to Protect Materials against Hostile Environments; G. Wahl, W. Decker, L. Klippe, A. Nürnberg, M. Pulver, R. Stolle. Plasma Spray, Detonation Gun and HVOF Deposition Techniques; R.C. Tucker Jr. Uses of Ion Implantation; P.D. Townsend. Ion Beam Assisted Thin Film Deposition: Fundamentals and Applications of IBAD Processing; J.K. Hirvonen. Laser Beam and Photon-Assisted Processes for Surface Treatments; J. Singh. Spectroscopic Analysis of Engineered Surfaces, Interfaces and Thin Layers; D.O. Boerma. Growth, Structure and Properties of Hard Nitride Based Coatings and Multilayers; J.-E. Sundgren, L. Hultman. Solid Lubricant Coatings Produced by Physical and Chemical Vapor Deposition Techniques; Y. Pauleau. Dielectric and Optical Coatings; J.M. Martínez-Duart, R. Pérez-Casero, R.M. Bueno, G. García-Ayuso, O. Sánchez-Garrido, E. Paule, J.M. Albella. Surface Treatments for Corrosion Protection; G.K. Wolf, R. Emmerich. Chemical and Physical Property Modifications Induced by Ion Irradiation in Polymers; G. Marletta, F. Iacona. Index.