Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems.
About the Author
Vikas Choudhary is the manager of the MEMS and Sensor Technology Group at Analog Devices, India.
Kris Iniewski is managing R&D at Redlen Technologies Inc., a start-up company in Vancouver, Canada.
Table of Contents
Microsystems to Nano-Microsystems: A Technological Break-Through, Hauden Daniel
HfO2 Thin Film for MEMS Applications, Bing Miao and Alton B. Horsfall
Efficient Reliability-Based Design Optimization for Microelectromechanical Systems, Manuel Engesser, A. Buhmann, and A.R. Franke
Hybrid Resonant Device, Dana Weinstein
Piezoelectric Thin Films for MEMS Applications, Isaku Kanno
MEMS Oscillators: From Emerging Technology to Commercial Revolution, Aaron Partridge
Bulk Acoustic Wave (BAW) Gyroscopes, Houri Johari
Energy Loss in MEMS Resonators, Amy E. Duwel
Trends in MEMS Packaging Technology, H.S. Yang and Muhannad Bakir
MEMS-BASED NOVEL APPLICATIONS
Designing VLSI Circuits and Systems with Nano-Electro Mechanical Relay, Vladimir Stojanovic
Bulk Acoustic Wave (BAW) Resonators for Mobile Communication Systems, Sumy Jose
A MEMS-Based Two-axis Gyroscope for OIS (Optical Image Stabilization) in Cameras, Vikas Choudhary
Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Application, Ballandras Sylvain
MEMS-Based Lamellar Grating Fourier-Transform Spectrometers, Hongbin Yu and Fook Siong Chau
Resonance for Multi-Transducer Systems, Behraad Bahreyni
Nanoporous Membranes for Renal Replacement Therapy: The Implantable Bioartificial Kidney, Shuvo Roy
Rigid Body Motions Capturing by Means of Wearable Inertial and Magnetic MEMS Sensors Assembly: An Application in Bio-Logging, Hassen Fourati, Noureddine Manamanni, Lissan Afilalb, and Yves Handrich
Radio-Controlled Wireless MEMS Actuators and Applications, Kenichi Takahata