Pub. Date:
Taylor & Francis
MEMS: Fundamental Technology and Applications / Edition 1

MEMS: Fundamental Technology and Applications / Edition 1

by Vikas Choudhary, Krzysztof Iniewski
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Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems.

Product Details

ISBN-13: 9781466515819
Publisher: Taylor & Francis
Publication date: 06/17/2013
Series: Devices, Circuits, and Systems Series , #15
Edition description: New Edition
Pages: 478
Product dimensions: 7.30(w) x 10.00(h) x 1.20(d)

About the Author

Vikas Choudhary is the manager of the MEMS and Sensor Technology Group at Analog Devices, India.

Kris Iniewski is managing R&D at Redlen Technologies Inc., a start-up company in Vancouver, Canada.

Table of Contents


Microsystems to Nano-Microsystems: A Technological Break-Through, Hauden Daniel

HfO2 Thin Film for MEMS Applications, Bing Miao and Alton B. Horsfall

Efficient Reliability-Based Design Optimization for Microelectromechanical Systems, Manuel Engesser, A. Buhmann, and A.R. Franke

Hybrid Resonant Device, Dana Weinstein

Piezoelectric Thin Films for MEMS Applications, Isaku Kanno

MEMS Oscillators: From Emerging Technology to Commercial Revolution, Aaron Partridge

Bulk Acoustic Wave (BAW) Gyroscopes, Houri Johari

Energy Loss in MEMS Resonators, Amy E. Duwel

Trends in MEMS Packaging Technology, H.S. Yang and Muhannad Bakir


Designing VLSI Circuits and Systems with Nano-Electro Mechanical Relay, Vladimir Stojanovic

Bulk Acoustic Wave (BAW) Resonators for Mobile Communication Systems, Sumy Jose

A MEMS-Based Two-axis Gyroscope for OIS (Optical Image Stabilization) in Cameras, Vikas Choudhary

Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Application, Ballandras Sylvain

MEMS-Based Lamellar Grating Fourier-Transform Spectrometers, Hongbin Yu and Fook Siong Chau

Resonance for Multi-Transducer Systems, Behraad Bahreyni

Nanoporous Membranes for Renal Replacement Therapy: The Implantable Bioartificial Kidney, Shuvo Roy

Rigid Body Motions Capturing by Means of Wearable Inertial and Magnetic MEMS Sensors Assembly: An Application in Bio-Logging, Hassen Fourati, Noureddine Manamanni, Lissan Afilalb, and Yves Handrich

Radio-Controlled Wireless MEMS Actuators and Applications, Kenichi Takahata

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