Microlithography/Molecular Imprinting

by Hiroshi Ito (Contribution by), Jean Daniel Marty (Contribution by), Monique Mauzac (Contribution by)

Overview

1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art and Perspectives.- 2. H. Ito: Chemical Amplification Resists for Microlithography.

Product Details

ISBN-13:	9783540218623
Publisher:	Springer Berlin Heidelberg
Publication date:	07/21/2005
Series:	Advances in Polymer Science , #172
Edition description:	2005
Pages:	276
Product dimensions:	6.10(w) x 9.25(h) x 0.03(d)

Table of Contents

1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art and Perspectives.- 2. H. Ito: Chemical Amplification Resists for Microlithography.