Reactive Sputter Deposition

The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin film or coating on it. Hence, it is not surprising that an overwhelming amount of scientific and technical papers is published each year on this topic. Sputter deposition is one of the many so-called physical vapour deposition (PVD) techniques. In most cases, sputter deposition uses a magnetically enhanced glow discharge or magnetron discharge to produce the ions which bombard and sputter the ...