| Preface | xiii |
| Reference | xiv |
| Acknowledgments | xv |
1 | Introduction | 1 |
1.1 | Topics Covered in This Book | 1 |
1.1.1 | Calibration | 1 |
1.1.2 | Coplanar Probes | 2 |
1.1.3 | High-Volume Probing | 2 |
1.1.4 | Test Fixtures | 2 |
1.1.5 | On-Wafer Characterization | 4 |
1.1.6 | RF Test Systems | 4 |
1.1.7 | Package Characterization | 4 |
1.2 | Components of an RF Test System | 4 |
1.2.1 | VNA | 5 |
1.2.2 | LCR Meter | 7 |
1.2.3 | RF Cables | 8 |
1.2.4 | Bias Cables | 9 |
1.2.5 | Bias Tees | 10 |
1.3 | RF Connectors | 11 |
1.3.1 | Connector Types | 11 |
1.3.2 | Making the Connection | 11 |
1.3.3 | Connector Care | 12 |
1.4 | RF Connector Adapters | 12 |
1.5 | The Probe Station | 12 |
1.6 | Summary | 13 |
| References | 13 |
2 | Calibration | 15 |
2.1 | Test System Errors: Random or Systematic | 15 |
2.2 | Concept of a Reference Plane | 16 |
2.3 | Error Models | 17 |
2.3.1 | Signal Flow Graph | 19 |
2.3.2 | Error Adapter | 21 |
2.4 | Calibration Standards | 23 |
2.4.1 | Calibration Coefficients | 24 |
2.4.2 | Short | 25 |
2.4.3 | Open | 26 |
2.4.4 | Load | 28 |
2.4.5 | Thru | 29 |
2.5 | Improving the Standards | 31 |
2.5.1 | Offset Delay | 31 |
2.5.2 | Offset Loss | 33 |
2.6 | Calibration Methods | 33 |
2.6.1 | SOLT | 35 |
2.6.2 | SOLR | 37 |
2.6.3 | TRL | 38 |
2.6.4 | LRM | 41 |
2.6.5 | LRRM | 42 |
2.7 | Verification | 43 |
2.7.1 | Verification Elements | 44 |
2.7.2 | Verifying with a Reference or "Golden" Unit | 45 |
2.8 | Isolation | 45 |
2.9 | Traceability | 47 |
2.10 | Repeatability, Reproducibility, and Accuracy | 48 |
2.11 | Calibration Tips and Tricks | 48 |
2.12 | Summary | 50 |
| References | 51 |
3 | Coplanar Probes | 55 |
3.1 | Theory of CPW | 55 |
3.2 | Mechanical Construction | 57 |
3.3 | Equivalent Circuit | 58 |
3.4 | Characterizing a Coplanar Probe | 60 |
3.5 | Using Coplanar Probes | 62 |
3.5.1 | Planarization | 62 |
3.5.2 | Alignment | 63 |
3.5.3 | Skating | 64 |
3.5.4 | Cleaning | 67 |
3.6 | Probe Configurations | 67 |
3.6.1 | Balanced | 67 |
3.6.2 | Unbalanced | 68 |
3.6.3 | Differential | 69 |
3.6.4 | Other Probe Configurations | 71 |
3.7 | Noncontact Probing | 71 |
3.8 | Applications | 72 |
3.8.1 | Millimeter-Wave Probing | 72 |
3.8.2 | Impedance-Matching, Low-Impedance Probes | 73 |
3.9 | Coplanar Probe Calibration Standards | 74 |
3.9.1 | Alumina Calibration Substrate | 75 |
3.9.2 | On-Wafer Calibration Standards | 76 |
3.9.3 | Open: In the Air or on Open Pads | 77 |
3.9.4 | More Design Tips | 78 |
3.9.5 | Verification | 79 |
3.10 | Summary | 80 |
| References | 80 |
4 | High-Volume Probing | 83 |
4.1 | High-Volume Test | 84 |
4.2 | RF Probe Card | 84 |
4.2.1 | Load Board | 85 |
4.2.2 | Probe Board | 86 |
4.2.3 | Contactor | 86 |
4.3 | Membrane Probe | 88 |
4.3.1 | Construction | 88 |
4.4 | Designing Membrane Probes | 89 |
4.4.1 | Digital and RF Signals | 90 |
4.4.2 | Grounding | 90 |
4.5 | Using Membrane Probes | 91 |
4.6 | Calibration | 93 |
4.7 | Summary | 93 |
| References | 93 |
5 | Test Fixtures | 95 |
5.1 | The Basic Test Fixture | 95 |
5.1.1 | Qualities of a Good Test Fixture | 97 |
5.1.2 | Characterizing the Fixture's Parasitic Effects | 97 |
5.1.3 | Types of Fixtures: R&D or Manufacturing | 98 |
5.1.4 | Fixturing for Passive Components | 98 |
5.1.5 | Fixturing for Active Components | 99 |
5.2 | RF Transitions | 99 |
5.2.1 | Coaxial to Microstrip | 100 |
5.2.2 | CPW to Microstrip | 102 |
5.2.3 | Rectangular Waveguide to CPW | 102 |
5.2.4 | Rectangular Waveguide to Microstrip | 104 |
5.2.5 | Rectangular Waveguide to Coaxial | 105 |
5.3 | Defining the Reference Planes | 105 |
5.4 | Two-Tier Calibration | 107 |
5.5 | Test Fixture Calibration | 108 |
5.5.1 | Calibration Standards: Coaxial Versus In-Fixture | 108 |
5.5.2 | Calibration Methods | 109 |
5.5.3 | Calibration Phase Uncertainty | 111 |
5.6 | Summary | 112 |
| References | 112 |
6 | On-Wafer Characterization | 115 |
6.1 | Conductive Versus Insulating Substrates | 116 |
6.2 | Probe Pads and Interconnecting Lines | 118 |
6.3 | De-embedding the Pads and Interconnects | 118 |
6.3.1 | Open | 119 |
6.3.2 | Open and Short | 122 |
6.3.3 | Open, Short, and Thru | 122 |
6.3.4 | Two-Port Network with a Thru | 123 |
6.3.5 | Two Shorts, an Open, and a Thru | 124 |
6.3.6 | Some Points to Consider When De-embedding | 126 |
6.3.7 | Should the Transistor Finger Metal Be De-embedded? | 128 |
6.3.8 | Effect of Pad Parasitics on f[subscript T] | 129 |
6.4 | De-embedding Pads for Noise | 131 |
6.5 | Measuring High-Isolation Devices | 134 |
6.6 | Characterizing Vertical Devices | 136 |
6.7 | Characterizing Passive Components | 138 |
6.8 | Millimeter-Wave Characterization | 138 |
6.9 | Summary | 140 |
| References | 141 |
7 | RF Test Systems | 145 |
7.1 | On-Wafer Noise Testing | 145 |
7.1.1 | Basic Concepts in Noise | 145 |
7.1.2 | On-Wafer Noise Sources | 147 |
7.1.3 | Faraday Shielding | 147 |
7.2 | High-Power RF Testing | 148 |
7.3 | Characterizing over Temperature | 150 |
7.3.1 | Heating the Wafer | 152 |
7.3.2 | Cryogenic Cooling | 152 |
7.4 | Summary | 154 |
| References | 154 |
8 | Package Characterization | 157 |
8.1 | Designing a Test Fixture for Package Characterization | 158 |
8.1.1 | RF Launchers | 158 |
8.1.2 | Coplanar Probes as RF Launchers | 159 |
8.1.3 | Test Fixture Body | 159 |
8.2 | The Carrier | 161 |
8.2.1 | Designing the Carrier | 163 |
8.2.2 | Carrier Board Material | 164 |
8.3 | Attaching the Package to the Carrier | 165 |
8.3.1 | Bond Wires | 165 |
8.3.2 | Conductive Adhesives | 168 |
8.4 | Calibration | 171 |
8.4.1 | Partitioning by Reference Planes | 172 |
8.5 | De-embedding the Fixture from the Measurement | 174 |
8.5.1 | De-embedding by Using a Thru Line | 175 |
8.5.2 | Time-Domain Analysis | 176 |
8.5.3 | How to Apply Time-Domain Techniques | 180 |
8.6 | Procedure for Characterizing a Package | 180 |
8.6.1 | Characterizing with a Thru | 182 |
8.6.2 | Characterizing with a Short | 183 |
8.6.3 | Characterizing with an Open | 183 |
8.6.4 | Characterizing with a Load | 183 |
8.6.5 | Characterizing with a PIN Diode | 184 |
8.6.6 | What to Do with the Unused Package Pins | 186 |
8.7 | Modeling a Package Mounted to a Carrier | 186 |
8.7.1 | Ground Inductance | 187 |
8.7.2 | Ground Paddle | 188 |
8.8 | Designing the Interconnecting Lines on the Carrier | 191 |
8.8.1 | CPW or Microstrip | 191 |
8.8.2 | CPW or CBCPW | 192 |
8.9 | Quantifying the RF Effect of the Package on the Die | 193 |
8.9.1 | Effective Relative Dielectric Constant [varepsilon subscript eff] | 193 |
8.9.2 | Propagation Constant [gamma] and Characteristic Impedance Z[subscript 0] | 193 |
8.9.3 | Loss Tangent tand | 195 |
8.10 | Package Styles | 196 |
8.10.1 | Plastic Surface Mount Packages | 196 |
8.10.2 | Flip-Chip | 196 |
8.10.3 | Bumped Chip Carrier | 199 |
8.11 | Summary | 200 |
| References | 200 |
9 | Future Trends | 205 |
9.1 | The Typical Design Cycle | 205 |
9.2 | The Separate Worlds of Digital and RF | 206 |
9.3 | The Goal: The Marriage of Digital and RF into a Single Wireless Product | 207 |
9.4 | New Substrate Materials | 208 |
9.5 | The Direction of RF Development | 209 |
9.6 | The Future of the RF Test | 210 |
9.7 | Summary | 211 |
| References | 211 |
| About the Author | 213 |
| Index | 215 |