Introduction to Semiconductor Manufacturing Technology

Introduction to Semiconductor Manufacturing Technology

by Hong Xiao
Introduction to Semiconductor Manufacturing Technology

Introduction to Semiconductor Manufacturing Technology

by Hong Xiao

eBook

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Overview

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. [i]Introduction to Semiconductor Manufacturing Technologies, Second Edition[/i] thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

Product Details

ISBN-13: 9780819490940
Publisher: SPIE Press
Publication date: 11/19/2012
Series: SPIE Press Monographs
Sold by: Barnes & Noble
Format: eBook
File size: 38 MB
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