Field Guide to Optical Lithography
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
1100313882
Field Guide to Optical Lithography
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
36.0
In Stock
5
1
Field Guide to Optical Lithography
Field Guide to Optical Lithography
36.0
In Stock
Product Details
| ISBN-13: | 9780819485182 |
|---|---|
| Publisher: | SPIE Press |
| Publication date: | 03/31/2011 |
| Series: | SPIE Field Guides |
| Sold by: | Barnes & Noble |
| Format: | eBook |
| File size: | 6 MB |
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