Ion-Solid Interactions: Fundamentals and Applications

by Michael Nastasi, James Mayer, James K. Hirvonen

Overview

Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams can modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties. Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text covers the fundamentals and applications of ion-solid interactions, and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis.

Product Details

ISBN-13:	9780521373760
Publisher:	Cambridge University Press
Publication date:	03/29/1996
Series:	Cambridge Solid State Science Series
Pages:	572
Product dimensions:	5.98(w) x 9.02(h) x 1.46(d)

Table of Contents

1. General features and fundamental concepts; 2. Interatomic potentials; 3. Dynamics of binary elastic collisions; 4. Cross-section; 5. Ion stopping; 6. Ion range and range distribution; 7. Radiation damage and spikes; 8. Ion–solid simulations and irradiation enhanced transport; 9. Sputtering; 10. Order-disorder under irradiation and ion implantation metallurgy; 11. Ion beam mixing; 12. Phase transformations; 13. Ion beam assisted deposition; 14. Applications of ion beam processing techniques; 15. Ion beam system features; Appendices: A. Crystallography; B. Table of contents; C. Density of states; D. Derivation of the Thomas–Fermi differential equations; E. Centre-of-mass and laboratory scattering angles; F. Miedema's semi-empirical model for the enthalpy of formation in the liquid and solid state; G. Implantation metallurgy – study of equilibrium alloys.

Editorial Reviews

Covers the fundamentals and applications of ion-solid interactions, for graduate students and researchers interested in electronic devices; surface engineering; reactor and nuclear engineering; and materials science issues associated with metastable phase synthesis. Early chapters review topics on interatomic potentials, binary collisions, and collision cross-sections. The remainder of the book consists of three sections on analytical descriptions of ion stopping, ranges, and radiation damage; ion beam issues such as ion implantation and mixing; and industrial applications and ion beam hardware. Includes chapter problems, and numerous mathematical appendices. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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