Order History
Premium Membership & Rewards
Help Center / FAQ
Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications
eBook
$190.00
Collect stamps to save with Rewards. 10 stamps = $5. Learn More
Select a store to view item availability.
Available on compatible , the free NOOK App, and in My Digital Library
NOOK App
Download NOOK app
NOOK Devices
NOOK eReaders
- NOOK GlowLight 4 Plus
- NOOK GlowLight 4e
- NOOK GlowLight 4
- NOOK GlowLight Plus 7.8"
- NOOK GlowLight 3
- NOOK GlowLight Plus 6"
NOOK Tablets
- NOOK 9" Lenovo Tablet
- NOOK 10" HD Lenovo Tablet
- NOOK Tablet 7" & 10.1"
- NOOK by Samsung Galaxy Tab 7.0 [Tab A and Tab 4]
- NOOK by Samsung [Tab 4 10.1, S2 & E]
Free NOOK Reading Apps
- NOOK for iOS
- NOOK for Android
BN.com website
Go to your Digital Library in My Account
Limit 1 per customer
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxi...