Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed.

The book offers a valuable reference guide for all researchers and engineers studying ad...