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Micro and Nano Fabrication: Tools and Processes

By Hans H. Gatzen, Volker Saile, Jürg Leuthold
Hardcover
$129.99
By Hans H. Gatzen, Volker Saile, Jürg Leuthold
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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