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X-Ray Metrology in Semiconductor Manufacturing

By D. Keith Bowen, Brian K. Tanner
eBook
$280.00
By D. Keith Bowen, Brian K. Tanner
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The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials prob...

Categories

Science & TechnologyEarth ScienceChemistryPhysicsAnalytical ChemistryPhysics of LightCrystallographyAnalytical Chemistry - General & MiscellaneousPhysics of Light - Spectrum Analysis