A Guide to Hands-on MEMS Design and Prototyping

by Joel A. Kubby

Overview

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Product Details

ISBN-13:	9781107645790
Publisher:	Cambridge University Press
Publication date:	08/25/2011
Edition description:	New Edition
Pages:	178
Product dimensions:	5.90(w) x 8.90(h) x 0.40(d)

About the Author

Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research consortium under the National Institute of Standards and Technology's Advanced Technology Program (ATP) to develop a new process for optical MEMS, and he has over 80 patents.

Table of Contents

1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.