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Bonding in Microsystem Technology

By Jan A. Dziuban
Hardcover
$169.99
By Jan A. Dziuban
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Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. Followed by the presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process flow-charts and applications of basic micromechanical structures in microsystems are shown. Next, high-temperature, low temperature and room-temperature bonding and their applications in microsystem technology are presen...

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Science & TechnologyEngineeringElectrical & Electronic EngineeringElectronics - MicroelectronicsElectronics - OptoelectronicsElectronics - Semiconductors