Ceramic Thick Films for MEMS and Microdevices

Ceramic Thick Films for MEMS and Microdevices

by Robert A. Dorey

Paperback

$210.00
View All Available Formats & Editions
Eligible for FREE SHIPPING
  • Want it by Tuesday, September 25?   Order by 12:00 PM Eastern and choose Expedited Shipping at checkout.

Overview

Ceramic Thick Films for MEMS and Microdevices by Robert A. Dorey

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications – forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc.




  • Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups
  • Written by a single author, this book provides a clear, coherently written guide to this important emerging technology
  • Covers materials, fabrication and applications in one book

Product Details

ISBN-13: 9780128103579
Publisher: Elsevier Science
Publication date: 09/02/2016
Pages: 250
Product dimensions: 7.50(w) x 9.25(h) x 0.46(d)

About the Author

Dr. Robert Dorey is a Royal Academy of Engineering/EPSRC Research Fellow, Senior Lecturer in Micro a

Table of Contents

Integration and applications

Routes to thick films

Thick film deposition techniques

Microstructure-property relationships

Pattering and structuring

Houston, we have a problem: Thick film troubleshooting

Recipes and techniques

Customer Reviews

Most Helpful Customer Reviews

See All Customer Reviews