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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

By Bijoy Bhattacharyya
eBook
$170.00
By Bijoy Bhattacharyya
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial microma...

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