Handbook of Optical Dimensional Metrology

Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods.

The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it t...