Measurement Technology for Micro-Nanometer Devices
eBook
$134.00
By Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices























