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MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
By Tai-Ran Hsu
Hardcover
$176.95
By Tai-Ran Hsu
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Technology/Engineering/Mechanical
A bestselling MEMS text...now better than ever.
An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to...
A bestselling MEMS text...now better than ever.
An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to...
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