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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems

By Jingmin Li, Chong Liu, Liding Wang
eBook
$99.00
By Jingmin Li, Chong Liu, Liding Wang
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This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent...