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Microsensors, MEMS, and Smart Devices

By Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
Hardcover
$88.97
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$177.95
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By Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integra...

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